Semiconductor devices

ABSTRACT

A semiconductor device including a plurality of active regions extending in a first direction on a substrate; a device isolation layer between the plurality of active regions such that upper portions of the plurality of active regions protrude from the device isolation layer; a first gate electrode and a second gate electrode extending in a second direction crossing the first direction and intersecting the plurality of active regions, respectively, on the substrate, the first gate electrode being spaced apart from the second gate electrode in the second direction; a first gate separation layer between the first gate electrode and the second gate electrode; and a second gate separation layer under the first gate separation layer and between the first gate electrode and the second gate electrode, the second gate separation layer extending into the device isolation layer in a third direction crossing the first direction and the second direction.

CROSS-REFERENCE TO RELATED APPLICATION

Korean Patent Application No. 10-2019-0043851, filed on Apr. 15, 2019,in the Korean Intellectual Property Office, and entitled: “SemiconductorDevices,” is incorporated by reference herein in its entirety.

BACKGROUND 1. Field

Embodiments relate to a semiconductor device.

2. Description of the Related Art

As demand for high performance, high speed, multifunctionality ofsemiconductor devices, or the like, is increased, a degree ofintegration of semiconductor devices is likewise increasing. Inmanufacturing a semiconductor element having a fine pattern,corresponding to a tendency for high integration of semiconductordevices, patterns having a fine width or a fine spacing distance may beimplemented.

SUMMARY

The embodiments may be realized by providing a semiconductor deviceincluding a plurality of active regions extending in a first directionon a substrate; a device isolation layer between the plurality of activeregions such that upper portions of the plurality of active regionsprotrude from the device isolation layer; a first gate electrode and asecond gate electrode extending in a second direction crossing the firstdirection and intersecting the plurality of active regions,respectively, on the substrate, the first gate electrode being spacedapart from the second gate electrode in the second direction; a firstgate separation layer between the first gate electrode and the secondgate electrode; and a second gate separation layer under the first gateseparation layer and between the first gate electrode and the secondgate electrode, the second gate separation layer extending into thedevice isolation layer in a third direction crossing the first directionand the second direction.

The embodiments may be realized by providing a semiconductor deviceincluding a plurality of active regions extending in a first directionon a substrate; a first gate electrode and a second gate electrodeextending in a second direction crossing the first direction andintersecting the plurality of active regions on the substrate, the firstgate electrode being spaced apart from the second gate electrode in thesecond direction; and a gate separation portion between the first gateelectrode and the second gate electrode, wherein the gate separationportion includes at least two layers stacked in a third direction,perpendicular to the first direction and the second direction, andhaving different widths.

The embodiments may be realized by providing a semiconductor deviceincluding a plurality of active regions extending in one direction; adummy active region in parallel with the plurality of active regions; afirst gate electrode and a second gate electrode intersecting theplurality of active regions and the dummy active region, the first gateelectrode being spaced apart from the second gate electrode on astraight line; a first gate separation layer extending downwardly fromupper surfaces of the first gate electrode and the second gateelectrode, the first gate separation layer being between the first gateelectrode and the second gate electrode; and a second gate separationlayer under the first gate separation layer, the second gate separationlayer being in contact with the first gate separation layer and thedummy active region.

BRIEF DESCRIPTION OF THE DRAWINGS

Features will be apparent to those of skill in the art by describing indetail exemplary embodiments with reference to the attached drawings inwhich:

FIG. 1 illustrates a plan view of a semiconductor device according toexample embodiments;

FIGS. 2A and 2B illustrate cross-sectional views of a semiconductordevice according to example embodiments;

FIG. 3 illustrates a perspective view of a semiconductor deviceaccording to example embodiments;

FIGS. 4A and 4B illustrate cross-sectional views of a semiconductordevice according to example embodiments;

FIGS. 5A and 5B illustrate a plan view and a cross-sectional view of asemiconductor device according to example embodiments;

FIGS. 6A to 6C illustrate a plan view and cross-sectional views of asemiconductor device according to example embodiments;

FIGS. 7A and 7B illustrate a plan view and a cross-sectional view of asemiconductor device according to example embodiments;

FIG. 8 illustrates a cross-sectional view of a semiconductor deviceaccording to example embodiments;

FIGS. 9A and 9B illustrate a plan view and a cross-sectional view of asemiconductor device according to example embodiments;

FIGS. 10A to 10L illustrate views of stages in a manufacturing method ofa semiconductor device according to a process order according to exampleembodiments;

FIGS. 11A to 11G illustrate views of stages in a manufacturing method ofa semiconductor device according to a process order according to exampleembodiments;

FIGS. 12A to 12C illustrate views of stages in a manufacturing method ofa semiconductor device according to a process order according to exampleembodiments;

FIG. 13 illustrates a circuit diagram of an SRAM cell including asemiconductor device according to example embodiments;

FIG. 14 illustrates a diagram of an electronic apparatus including asemiconductor device according to example embodiments; and

FIG. 15 illustrates a schematic diagram of a system including asemiconductor device according to example embodiments.

DETAILED DESCRIPTION

FIG. 1 illustrates a plan view of a semiconductor device according toexample embodiments. FIGS. 2A and 2B illustrate cross-sectional views ofthe semiconductor device of FIG. 1 along lines I-I′ and II-II′, andIII-III′ and IV-IV′, respectively. FIG. 3 illustrates a perspective viewof a portion of the semiconductor device of FIG. 1. For convenience ofexplanation, only major components of the semiconductor device are shownin FIGS. 1 to 3.

Referring to FIGS. 1 to 3, a semiconductor device 100 may include asubstrate 101, active regions 105, device isolation layers 110,source/drain regions 150, gate structures 160, and a gate separationportion 170. The gate structure 160 may include a gate dielectric layer162, a gate electrode 165, and gate spacer layers 166. The gateseparation portion 170 may include a first gate separation layer 172 anda second gate separation layer 174.

The semiconductor device 100 may include FinFET devices in which theactive regions 105 have a fin structure. The FinFET devices may includetransistors about the active regions 105 and the gate structures 160that intersect with each other.

The substrate 101 may have an upper surface extending in an X directionand a Y direction (e.g., a planar surface defined by the X direction andY direction, X-Y plane). The substrate 101 may include a semiconductormaterial, e.g., a Group IV semiconductor, a Group III-V compoundsemiconductor, or a Group II-VI compound semiconductor. For example, theGroup IV semiconductor may include silicon, germanium orsilicon-germanium. The substrate 101 may be provided as a bulk wafer, anepitaxial layer, a silicon on insulator (SOI) layer, a semiconductor oninsulator (SeOI) layer, or the like.

The device isolation layers 110 may define the active regions 105 in thesubstrate 101. In an implementation, the device isolation layers 110 mayinclude a region extending deeper (e.g., in a Z direction perpendicularor orthogonal to the X-Y plane) into a lower portion of the substrate101 between the active regions 105, and may be a single layer by beingconnected to each other in an end portion, in the X direction. In animplementation, the device isolation layers 110 may have a curved uppersurface (e.g., inwardly curved or concave in the Z direction toward thesubstrate 101) having a higher height (e.g., having a portion that isfarther from the substrate 101 in the Z direction) in a vicinity of oradjacent to the active regions 105. The device isolation layers 110 maybe made of an insulating material. The device isolation layers 110 maybe, e.g., an oxide, a nitride, or a combination thereof. As shown in thecross-sectional view of FIG. 2A, the device isolation layers 110 mayhave different heights at upper surfaces thereof (e.g., surfaces facingaway from the substrate 101), in a lower portion and outside of the gatestructure 160. In an implementation, the height differences of the uppersurfaces may be variously altered.

The active regions 105 may be defined by the device isolation layers 110in or on the substrate 101, and may extend in a first direction, e.g.,the X direction. The active regions 105 may have a structure of anactive fin protruding (e.g., in the Z direction) from the substrate 101.Upper ends of the active regions 105 may protrude to a predeterminedheight from (e.g., farther from the substrate 101 than) the uppersurfaces of the device isolation layers 110 (e.g., in the Z direction).In an implementation, the active regions 105 may be formed of a portionof the substrate 101, or may include an epitaxial layer grown from thesubstrate 101. In an implementation, on both sides of the gatestructures 160, the active regions 105 on the substrate 101 may bepartially recessed, and the source/drain regions 150 may be on therecessed active regions 105. For example, as shown in FIGS. 2A and 2B,in or under the lower portion of the gate structure 160, the activeregions 105 may have a relatively high height. In an implementation, theactive regions 105 may include impurities, and at least a portion of theactive regions 105 may include impurities of different conductivitytypes.

A dummy active region 105D may be further included between the activeregions 105. The dummy active region 105D may be a region in which achannel region of a transistor is not formed in the semiconductor device100, and an electrical function is not substantially performed. Thedummy active region 105D may have a shape extending in the X directionsimilar to the active regions 105, and may be disposed at regularintervals together with the active regions 105. The dummy active region105D may have a height H2 (e.g., in the Z direction) that is lower thana height H1 (in the Z direction) of the active region 105 in or adjacentto the lower portion of or under the gate separation portion 170, asshown in FIGS. 2A and 2B. This may be a shape formed by a process inwhich the active region 105 is partially removed and the dummy activeregion 105D is formed. This will be described in more detail below withreference to FIGS. 10A to 11G.

In an implementation, the dummy active region 105D may also have theheight H2 that is lower than a height H3 (in the Z direction) of therecessed active region 105, on or at both sides of the gate structures160. In this case, the dummy active region 105D may have a form recessedinto the device isolation layer 110. In an implementation, the height ofthe dummy active region 105D on both sides of the gate structures 160may be the same or similar height as the height H3 of the active region105. In an implementation, the dummy active region 105D may have thesame height in the lower portion of the gate separation portion 170 andon both sides of the gate structures 160. In an implementation, thedummy active region 105D may also have a height lower than the height inthe lower portion of the gate separation portion 170, on both sides ofthe gate structures 160, similar to the active region 105.

Source/drain regions 150 may be on the active regions 105, respectively,at both sides of the gate structures 160. The source/drain regions 150may be provided as a source region or a drain region of transistors. Thesource/drain regions 150 may have elevated source/drain shapes in whichupper surfaces thereof are higher than lower (e.g., substrate-facing)surfaces of the gate structures 160, e.g., the gate electrodes 165.

In an implementation, the source/drain regions 150 may have a hexagonalshape. In an implementation, a portion of the source/drain regions 150may have a hexagonal shape and the other portion thereof may have apentagonal shape. In an implementation, the source/drain regions 150 mayhave various shapes, e.g., may have any one of shapes, for example,polygonal, circular, and rectangular. In an implementation, thesource/drain regions 150 may be connected or merged to each other on twoor more active regions 105 disposed adjacent to each other to form onesource/drain region 150.

The source/drain regions 150 may be made of a semiconductor material. Inan implementation, the source/drain regions 150 may be formed of anepitaxial layer. For example, the source/drain regions 150 may includen-type doped silicon (Si) and/or p-type doped silicon germanium (SiGe).In an implementation, the source/drain regions 150 may include aplurality of regions including elements having different concentrationsand/or doping elements.

The gate structure 160 may extend in one direction, e.g., the Ydirection, intersecting the active regions 105 in or on the upperportions of the active regions 105. A channel region of transistors maybe formed in the active regions 105 intersecting the gate structure 160.The gate structure 160 may include a gate dielectric layer 162, a gateelectrode 165, and gate spacer layers 166.

The gate dielectric layer 162 may be between the active regions 105 andthe gate electrodes 165, and may cover the lower surfaces and both sidesurfaces of the gate electrodes 165. In an implementation, the gatedielectric layer 162 may be formed only on the lower surface of the gateelectrode 165 (e.g., and may not extend along the sides of the gateelectrode 165). The gate dielectric layer 162 may include an oxide, anitride, or a high dielectric constant (high-k) material. The high-kmaterial may refer a dielectric material having a dielectric constant,higher than that of silicon oxide (SiO₂). The high-k material may be anyone of, e.g., aluminum oxide (Al₂O₃), tantalum oxide (Ta₂O₃), titaniumoxide (TiO₂), yttrium oxide (Y₂O₃), zirconium oxide (ZrO₂), zirconiumsilicon oxide (ZrSi_(x)O_(y)), hafnium oxide (HfO₂), hafnium siliconoxide (HfSi_(x)O_(y)), lanthanum oxide (La₂O₃), lanthanum aluminum oxide(LaAl_(x)O_(y)), lanthanum hafnium oxide (LaHf_(x)O_(y)), hafniumaluminum oxide (HfAl_(x)O_(y)), and praseodymium oxide (Pr₂O₃).

The gate electrode 165 may include a conductive material, and mayinclude, e.g., a metal nitride such as a titanium nitride film (TiN), atantalum nitride film (TaN), or a tungsten nitride film (WN), and/or ametal material such as aluminum (Al), tungsten (W), molybdenum (Mo), orthe like, or a semiconductor material such as doped polysilicon. Thegate electrodes 165 may be formed of two or more multilayer structures.The gate electrode 165 may be separated by the gate separation portion170 between at least a portion of adjacent transistors, depending on theconfiguration of the semiconductor device 100.

The gate spacer layers 166 may be on both sides of the gate electrode165. The gate spacer layers 166 may insulate the source/drain regions150 and the gate electrodes 165 from each other. The gate spacer layers166 may be formed of a multilayer structure according to exampleembodiments. The gate spacer layers 166 may include oxides, nitrides,and oxynitrides, e.g., low dielectric constant films.

The gate separation portion 170 may separate each gate electrode 165extending in one direction (e.g., the Y direction) into a first gateelectrode 165A and a second gate electrode 165B among at least a portionof transistors. The gate separation portion 170 may extend in adirection perpendicular to an extending direction of the gate electrode165, e.g., in the X direction, to separate the gate dielectric layer 162and the gate electrode 165. The gate separation portion 170 may includea first gate separation layer 172 and a second gate separation layer 174vertically connected to each other. The first gate separation layer 172may separate the gate electrode 165 from the upper portion of the gatestructure 160, and the second gate separation layer 174 may be on thelower portion of the first gate separation layer 172, and may extendinto the device isolation layer 110 between the active regions 105(e.g., active regions 105 that are adjacent to each other in the Ydirection).

In an implementation, the first gate separation layer 172 may be on aplane to separate the gate dielectric layers 162 on both sides as wellas the gate electrode 165, as shown in FIG. 1. In an implementation, itis also possible that the first gate separation layer 172 separates onlythe gate electrode 165. The first gate separation layer 172 may extenddownwardly (in the Z direction) from the upper surface of the gateelectrode 165 and may extend to the upper surface of the active region105 or to a similar height level thereto (e.g., a similar distance inthe Z direction from the substrate 101). The lower surface of the firstgate separation layer 172 may be at a height (e.g., a distance from thesubstrate 101 in the Z direction) that is higher than the upper surfaceof the device isolation layer 110. In an implementation, the uppersurface of the first gate separation layer 172 may be coplanar with thegate electrode 165.

The second gate separation layer 174 may be on the dummy active region105D, and the upper surface of the second gate separation layer 174 maybe in contact (e.g., direct contact) with the first gate separationlayer 172. The second gate separation layer 174 together with the dummyactive region 105D may have the same or similar shape as the activeregion 105. For example, the second gate separation layer 174 may have ashape corresponding to (e.g., similar or identical to) an upper regionof the active region 105, and the upper surface of the second gateseparation layer 174 may be located at substantially the same height asthe upper surfaces of the adjacent active regions 105. The second gateseparation layer 174 may protrude upwardly and downwardly from orrelative to the upper surface of the device isolation layer 110. Forexample, a lower portion of the second gate separation layer 174 mayextend into the device isolation layer 110 to be in a recessed form orarea of the device isolation layer 110, as shown in FIG. 2A.

In an implementation, a lower surface of the second gate separationlayer 174 may be at a lower height level (e.g., closer to the substrate101 in the Z direction) than that of the upper surface of the deviceisolation layer 110, and may have a downward convex shape (e.g., in theZ direction toward the substrate 101). In an implementation, the lowersurface of the second gate separation layer 174 may have a flat surface,depending on a manufacturing method thereof. A recessed depth D1 and aprotruded height H4 of the second gate separation layer 174 from theupper surface of the device isolation layer 110 may be variously alteredin the example embodiments. A side surface of the second gate separationlayer 174 at the upper portion thereof (e.g., distal to the substrate101 in the Z direction) may be in contact (e.g., direct contact) withthe gate dielectric layer 162. A side surface of the second gateseparation layer 174 at the lower portion thereof (e.g., proximate tothe substrate 101 in the Z direction) may be in contact (e.g., directcontact) with the device isolation layer 110.

In an implementation, the second gate separation layer 174 may have awidth W2 (in the Y direction) that is smaller than the width W1 (in theY direction) of the first gate separation layer 172. For example, a stepor a bending portion according to the difference in width may be presentbetween the first gate separation layer 172 and the second gateseparation layer 174. The width W1 of the first gate separation layer172 may be, e.g., 5 nm to 100 nm, and the width W2 of the second gateseparation layer 174 may be, e.g., 1 nm to 20 nm. In an implementation,the width W2 of the second gate separation layer 174 may be the same asor similar to the width of the active region 105. In an implementation,as shown in the cross-section of III-III′ of FIG. 2B, the second gateseparation layer 174 may have a side surface that is perpendicular tothe upper surface of the dummy active region 105D. In an implementation,the second gate separation layer 174 may have a shape corresponding tothe shape of the gate structure 160. For example, it is also possiblethat the second gate separation layer 174 has a shape in which the widthis widened toward the lower portion in the cross-section of III-III′.The second gate separation layer 174 may only be on the lower portion ofthe first gate separation layer 172 on a plane, as shown in FIG. 1, andmay not extend to the lower portion of the gate spacer layer 166. In animplementation, the second gate separation layer 174 may also extend tothe lower portion of the gate spacer layer 166.

The first and second gate separation layers 172 and 174 may include thesame or different insulating materials. The first and second gateseparation layers 172 and 174 may be made of a material capable ofhaving etching selectivity under a specific etching condition withrespect to the device isolation layer 110, and may be made of a materialcapable of having etching selectivity with respect to a secondsacrificial layer 184, or the like, described with reference to FIG.10E. In an implementation, the first and second gate separation layers172 and 174 may each independently include, e.g., SiN, SiOCN, AlN, orthe like.

The gate separation portion 170 may include first and second gateseparation layers 172 and 174 vertically stacked and disposed such thatthe adjacent first and second gate electrodes 165A and 165B may beelectrically and completely separated. For example, the second gateseparation layer 174 may be formed using the dummy active region 105D tocompletely isolate the first and second gate electrodes 165A and 165Belectrically in the X direction and block a leakage current. Forexample, even when the gate structures 160 have a shape widened in the Xdirection in a region adjacent to the device isolation layer 110, thesecond gate separation layer 174 may be fill a region between a pair ofgate space layers 166 such that the first and second gate electrodes165A and 165B may be completely electrically insulated from each other.

As shown in FIG. 1, a distance W3 from a side surface of the second gateseparation layer 174 in the Y direction to a side surface of theadjacent active region 105 may be a factor affecting the characteristicsuch as a threshold voltage of a transistor formed by the active region105 and the gate structure 160. With regard thereto, in animplementation, the gate separation portion 170 may include the secondgate separation layer 174 at the lower portion thereof, as compared withthe case in which the gate separation portion 170 includes only thefirst gate separation layer 172 (e.g., without the second gateseparation layer 174), and a portion which affects the characteristicsof the transistor may be formed without any process deviation, and theelectrical characteristics of the semiconductor device 100 may befurther improved.

FIGS. 4A and 4B illustrate cross-sectional views of a semiconductordevice according to example embodiments. FIGS. 4A and 4B illustrateregions corresponding to the cross-section along I-I′ in FIG. 2A.

Referring to FIG. 4A, in a semiconductor device 100 a, a first gateseparation layer 172 a of a gate separation portion 170 a may cover aportion of the side surface of the second gate separation layer 174. Forexample, the first gate separation layer 172 a may extend downwardly(e.g., in the Z direction toward the substrate 101) along the sidesurface of the second gate separation layer 174 to a predetermined depthfrom the upper portion of the second gate separation layer 174. In animplementation, the lower surface of the first gate separation layer 172a on the side surface of the second gate separation layer 174 may extendalong the side surface of the second gate separation layer 174 to have amore curved shape.

A gate dielectric layer 162 may be between the second gate separationlayer 174 and the gate electrode 165, and may not be on the uppersurface and side surfaces of the second gate separation layer 174 thatare in contact with the first gate separation layer 172 a.

Referring to FIG. 4B, in a semiconductor device 100 b, a first gateseparation layer 172 b of a gate separation portion 170 b may cover aportion of the upper surface and a portion of (e.g., only) one sidesurface of the second gate separation portion 174. For example, thefirst gate separation layer 172 b may extend downwardly along the oneside surface of the of the second gate separation layer 174 to apredetermined depth from an upper portion of the second gate separationlayer 174. In an implementation, the lower surface of the first gateseparation layer 172 b on the side surface of the second gate separationlayer 174 may extend along the side surface of the second gateseparation layer 174 to have a more curved shape.

The gate dielectric layer 162 may be between the second gate separationlayer 174 and the gate electrode 165, and may not be on the uppersurface and side surfaces of the second gate separation layer 174 thatare in contact with the first gate separation layer 172 b.

FIGS. 5A and 5B illustrate a plan view and a cross-sectional view of asemiconductor device according to example embodiments. FIG. 5Billustrates a cross-sectional view of the semiconductor device of FIG.5A taken along the line I-I′.

Referring to FIGS. 5A and 5B, in a semiconductor device 100 c, a gatedielectric layer 162P of the gate structure 160 may be further disposedon the side surface of the first gate separation layer 172 (e.g., sidesurfaces of the first gate separation layer 172 facing in the Ydirection). As illustrated in FIG. 5B, the gate dielectric layer 162Pmay extend on the side surface of the first gate separation layer 172 aswell as on the side surface of the second gate separation layer 174.This structure may be generated by a manufacturing method differencedescribed below with reference to FIGS. 12A to 12C. In animplementation, as shown in FIG. 5A, the gate dielectric layer 162P maynot be on the side surface of the first gate separation layer 172 facingin the X direction.

FIGS. 6A to 6C illustrate a plan view and cross-sectional views of asemiconductor device according to example embodiments. FIGS. 6B and 6Cillustrate cross-sections of the semiconductor device of FIG. 6A cutalong the cutting lines I-I′ and II-II′, and III-III′ and IV-IV′,respectively.

Referring to FIGS. 6A to 6C, in a semiconductor device 100 d, a secondgate separation layer 174 c of a gate separation portion 170 c may havean extended shape together with the dummy active region 105D in the Xdirection. For example, on or at both sides of the gate structure 160, asecond gate separation layer 174 c may be between adjacent source/drainregions 150, as illustrated in the cross-sectional view taken alongII-II′ of FIG. 6B. The second gate separation layer 174 c may have aheight H6 at a portion outside of the gate structure 160 that is lowerthan the height H5 of the second gate separation layer 174 c in thelower portion of or underlying the first gate separation layer 172. Forexample, a growth of the source/drain regions 150 may be performed moreeasily. In an implementation, the height H5 of the second gateseparation layer 174 c underlying the first gate separation layer 172may be the same as the height H6 outside of the gate structure 160.

FIGS. 7A and 7B illustrate a plan view and a cross-sectional view of asemiconductor device according to example embodiments. FIG. 7Billustrates cross-sections taken along cutting lines I-I′ and II-II′ ofthe semiconductor device of FIG. 7A.

Referring to FIGS. 7A and 7B, in the semiconductor device 100 e, thesecond gate separation layer 174 d of the gate separation portion 170 dmay be on the device isolation layer 110. For example, the dummy activeregion 105D may not be present, e.g., may not be under the lower portionof the second gate separation layer 174 d of the gate separation portion170 d. This structure may be formed by removing the active region 105under the lower portion of the second gate separation layer 174 d or bynot forming the active region 105. The second gate separation layer 174d may extend into the device isolation layer 110 or between the deviceisolation layers 110 and the second gate separation layer 174 d may bedisposed such that a portion of the lower surface and the side surfaceare in contact with the device isolation layer 110 and have a protrudedshape onto the device isolation layer 110 at the same time. In animplementation, the second gate separation layer 174 d may have a shapethat does not correspond to (e.g., may be independent to) the shape ofthe active region 105. For example, the width of the upper portion andthe width of the lower portion of the second gate separation layer 174 dmay be substantially the same or the width of the lower portion may benarrower.

The second gate separation layer 174 d may have a shape extending in theX direction together with the active region 105 to the outside of thegate structure 160. A height H7 of the second gate separation layer 174c under (e.g., between the first gate separation layer 172 and thesubstrate 101 in the Z direction or third direction) the lower portionof the first gate separation layer 172 may be the same as or differentfrom a height H8 outside of the gate structure 160. If the height H8outside of the gate structure 160 were to be smaller than the height H7in the lower portion of the first gate separation layer 172, a growth ofthe source/drain regions 150 could be performed more easily. In animplementation, similar to the semiconductor device 100 of FIG. 1, thesecond gate separation layer 174 d may not be disposed outside of thegate structure 160.

FIG. 8 illustrate a cross-sectional view of a semiconductor deviceaccording to example embodiments. FIG. 8 illustrates a regioncorresponding to a cross-section along the line I-I′ of FIG. 2A.

Referring to FIG. 8, in a semiconductor device 100 f, a gate separationportion 170 e may have a shape in which the first gate separation layer172 e extends into the dummy active region 105D, and the second gateseparation layer 174 e may be on the side surface of the dummy activeregion 105D to have a shape contacting the first gate separation layer172 e.

The first gate separation layer 172 e may have a recessed form of, e.g.,may be in a recess in, the dummy active region 105D, and a recesseddepth D2 may be selected in a range such that a lower end of the firstgate separation layer 172 e is located at a height level that is lowerthan that of the upper surface of the active region 105 and is locatedat a height level that is higher than that of the upper surface of thedevice isolation layer 110. For example, in the Z direction, a distancefrom the substrate 101 to the lower surface of the first gate separationlayer 172 e may be greater than a distance from the substrate 101 to theupper surface of the device isolation layer 110 and may be less than adistance from the substrate 101 to the upper surface of the activeregion 105. The second gate separation layer 174 e may be formed of orfrom a portion of the gate dielectric layer 162, and may be made of thesame material as the gate dielectric layer 162 or may further includeimpurities in the material of the gate dielectric layer 162. In animplementation, the second gate separation layer 174 e may furtherinclude a layer formed by oxidizing or nitriding the dummy active region105D. In an implementation, the dummy active region 105D may furtherinclude impurities in the upper portion thereof. The dummy active region105D may have a substantially insulating property due to the presence ofthe impurities.

According to the gate separation portion 170 e of the presentembodiment, a process for forming the second gate separation layer 174 emay be simplified, such that a manufacturing process may be relativelyeasily performed. For example, the second gate separation layer 174 emay be easily formed even when sizes of structures of the semiconductordevice 100 f including the gate structure 160 are reduced.

FIGS. 9A and 9B illustrate a plan view and a cross-sectional view of asemiconductor device according to example embodiments. FIG. 9B showscross sections cut along the cutting lines IA-IA′ and IB-IB′ of thesemiconductor device of FIG. 9A.

Referring to FIGS. 9A and 9B, a semiconductor device 100 g may includefirst and second regions R1 and R2 in which gate structures 160A and160B including gate electrodes 165 having first and second lengths L1and L2 in the X direction. The second length L2 may be greater than thefirst length L1. In the first region R1, the gate separation portion 170may include first and second gate separation layers 172 and 174, as inthe semiconductor device 100 of FIG. 1. In the second region R2, thegate separation portion 170 f may be formed of a single layer, unlikethe first region R1, may isolate the first and second gate electrodes165A and 165B, and may extend from the upper portion or surface thereofin the Z direction to at least the upper surface of the device isolationlayer 110.

As described above, the gate structures 160A may be isolated by the gateseparation portion 170 having a plurality of layers, being stackedvertically, in a portion of the semiconductor device 100 g, and may beisolated by the gate separation portion 170 f having a single layer, inthe other region of the semiconductor device 100 g. In animplementation, the first and second regions R1 and R2 may be dividedaccording to the lengths of the gate structures 160A and 160B. In animplementation, the first and second regions R1 and R2 may be dividedaccording to a spacing distance between the first and second gateelectrodes 165A and 165B, and the gate separation portion 170 f havingthe single layer may be used when the spacing distance is large.Further, the first and second regions R1 and R2 may be selected inconsideration of the size and the degree of integration of elements inthe semiconductor device 100 g. For example, the structure and theprocess suitable for each region may be selectively applied to thesemiconductor device 100 g, such that the manufacturing process may beefficiently performed while ensuring reliability.

FIGS. 10A to 10L illustrate views of stages in a manufacturing method ofa semiconductor device according to example embodiments according to aprocess order. In FIGS. 10A to 10L, an example embodiment of themanufacturing method for manufacturing the semiconductor device of FIGS.1 to 3 will be described.

Referring to FIG. 10A, a substrate 101 may be patterned to form trenchregions TI defining active regions 105.

First, a pad oxide pattern 142 and a first mask pattern 144 may beformed on the substrate 101. In an implementation, the pad oxide pattern142 may be a layer for protecting upper surfaces of the active regions105. In an implementation, the pad oxide pattern 142 may be omitted. Thefirst mask pattern 144 may be a mask layer for patterning the substrate101, and may include silicon nitride, a carbon-containing material, orthe like. The first mask pattern 144 may be formed of a multilayerstructure.

The substrate 101 may be anisotropically etched using the pad oxidepattern 142 and the first mask pattern 144 to form the trench regionsTI. The trench regions TI may have a high aspect ratio, widths thereofmay become narrower toward the lower portion, and accordingly, theactive regions 105 may have a shape becoming narrower toward the upperportion.

Referring to FIG. 10B, the device isolation layer 110 filling the trenchregions TI may be formed.

A process of planarizing the trench regions TI along the upper surfacesof the active regions 105 after the trench regions TI are filled with aninsulating material may be performed. During the planarization process,at least a portion of the pad oxide pattern 142 and the first maskpattern 144 may be removed. In an implementation, the pad oxide pattern142 may remain on the upper surfaces of the active areas 105 up to theprocess step described with reference to FIG. 10D. In an implementation,a relatively thin liner layer may first be formed in the trench regionsTI and then the trench regions TI may be filled.

Referring to FIG. 10C, a portion of the active region 105 may be removedto form a dummy active region 105D between the active regions 105.

First, a second mask pattern 146, exposing the active region 105 to bethe dummy active region 105D may be formed on the device isolation layer110. The second mask pattern 146 may be a mask layer for removing aportion of the exposed active region 105, and may include a materialhaving etch selectivity with respect to the material of the deviceisolation layer 110 and the active regions 105. The second mask pattern146 may be formed as a multilayer structure.

Next, the dummy active region 105D may be formed by removing the exposedactive region 105 to a predetermined depth from the upper surface. Theactive region 105 to be recessed may be selectively removed by wetetching, or the like, with respect to the device isolation layer 110,and the recess depth may be controlled by adjusting an etching time, andthe like, and may be variously changed in example embodiments.

The semiconductor device 100 e with reference to FIGS. 7A and 7B may beformed by removing or not forming a portion of the active regions 105,removing the device isolation layer 110 from the upper portion to apredetermined depth to form the second gate separation layer 174 d, andthen performing subsequent steps.

Referring to FIG. 10D, the second gate separation layer 174 may beformed on the dummy active region 105D, and the active regions 105 andthe second gate separation layer 174 may be formed to protrude onto thedevice isolation layer 110.

First, a material for forming the second gate separation layer 174 maybe filled in the dummy active region 105D (that has been recessed intothe device isolation layer 110) as shown in FIG. 10C to form the secondgate separation layer 174. After the second gate separation layer 174 isformed, the second mask pattern 146 may be removed, and a planarizationprocess may be further performed, if desired.

Next, the device isolation layer 110 may be partially removed from theupper portion to perform a process of protruding the active regions 105and the second gate separation layer 174 onto or from the deviceisolation layer 110. The process may be performed, e.g., by wet etchingprocess, and the present process may be performed in a state the padoxide pattern 142 of FIG. 10A or a separate mask layer is formed on theactive regions 105 for protecting the active regions 105. For example,the active regions 105 and the second gate separation layer 174 mayprotrude to a predetermined height from the upper portion of the deviceisolation layer 110, and the protruded height may be variously changedin example embodiments. During the etching process, the pad oxidepattern 142 or the separate mask layer may also be removed together.

Referring to FIG. 10E, first and second sacrificial layers 182 and 184may be formed on the active regions 105, the second gate separationlayer 174, and the device isolation layer 110.

The first and second sacrificial layers 182 and 184 may be patterned tohave a line shape extending in the Y direction intersecting the activeregions 105. The first and second sacrificial layers 182 and 184 may bepatterned using a third mask pattern layer 186. The first and secondsacrificial layers 182 and 184 may be a sacrificial gate structureformed in a region in which the gate dielectric layer 162 and the gateelectrode 165 are disposed as shown in FIG. 3 through a subsequentprocess.

In an implementation, the first and second sacrificial layers 182 and184 may be an insulating layer and a conductive layer, respectively. Inan implementation, the first and second sacrificial layers 182 and 184may be formed of a single layer. For example, the first sacrificiallayer 182 may include silicon oxide and the second sacrificial layer 184may include polysilicon. The third mask pattern layer 186 may includesilicon oxide and/or silicon nitride.

Referring to FIG. 10F, at least a portion of the second gate separationlayer 174 may be removed from both sides or outside of the first andsecond sacrificial layers 182 and 184.

The second gate separation layer 174 may be selectively removed withrespect to the active regions 105, the dummy active region 105D, and thedevice isolation layer 110, whereby the upper surface of the dummyactive region 105D may be exposed. The second gate separation layer 174may only remain on the lower portions of or under the first and secondsacrificial layers 182 and 184. In an implementation, the secondisolation layer 174 may be partially removed, but not all, from theupper surface thereof, to a predetermined depth. As described above,when the second gate separation layer 174 is removed on both sides ofthe first and second sacrificial layers 182 and 184, the growth of thesource/drain regions 150 may not be disturbed by the second gateseparation layer 174 when the source/drains 150 are formed in thesubsequent processes.

The semiconductor device 100 d described with reference to FIGS. 6A and6B may be prepared by removing only a portion of the second gateseparation layer 174 in the present step or omitting the present step.

Referring to FIG. 10G, a gate spacer layer 166 may be formed on theactive regions 105, the device isolation layer 110, and the third maskpattern layer 186 and the exposed active regions 105 may be recessed andthe source/drain regions 105 may be formed.

First, the gate spacer layer 166 may be formed along the upper surfacesand/or the side surfaces of the active regions 105, the device isolationlayer 110, the first and second sacrificial layers 182 and 184, and thethird mask pattern layer 186 to have a uniform thickness. The gatespacer layer 166 may be made of a material having a low dielectricconstant, and may include, e.g., at least one of SiO, SiN, SiCN, SiOC,SiON, and SiOCN.

Next, the gate spacer layer 166 may be removed from the upper surfacesof the active regions 105 to expose the upper surfaces of the activeregions 105, and then the exposed active regions 105 may be recessed toa predetermined depth from the upper surface. The recess process may beperformed, e.g., by sequentially applying a dry etching process and awet etching process. For example, in the present step, the activeregions 105 may have a lower height outside of the first and secondsacrificial layers 182 and 184 than in the lower portions of the firstand second sacrificial layer 182 and 184. Selectively, after the recessprocess, a process of curing surfaces of the recessed active regions 105may be performed through a separate process. Selectively, a process ofinjecting impurities into the active regions 105, before or after therecess process may be performed. During these processes, the gate spacerlayer 166 may have a shape as illustrated, being partially removed andremaining only on the side surfaces of the first to second sacrificiallayers 182 and 184 and the third mask pattern layer 186. In animplementation, a material for forming the gate spacer layer 166 mayremain in the form of a spacer on sidewalls of the active regions 105 aswell. In an implementation, during the processes, the device isolationlayer 110 may be partially removed outside of the first to secondsacrificial layers 182 and 184 and the height thereof may be relativelyreduced.

The source/drain regions 150 may be formed using, e.g., a selectiveepitaxial growth (SEG) process. The source/drain regions 150 may be,e.g., a silicon (Si) layer or a silicon germanium (SiGe) layer. Duringgrowth of the source/drain regions 150, impurities such as phosphorus(P), boron (B), and the like, may be doped in-situ or separatelyimplanted after the growth. In an implementation, the source/drainregions 150 may be grown along a crystallographically stable surface inthe growth process to have hexagonal, pentagonal, or similar shapes asshown according to the material for forming the source/drain regions150.

Referring to FIG. 10H, an interlayer insulating layer 190 may be formedon the source/drain regions 150, and the first and second sacrificiallayers 182 and 184, the sacrificial gate structures, may be removed.

First, the interlayer insulating layer 190 may be formed by depositingan insulating material to cover the source/drain regions 150, the thirdmask pattern layer 186, and the gate spacer layer 166, and then byexposing the upper surface of the second sacrificial layer 182 throughthe planarization process. In the planarization process, the third maskpattern layer 186 may be removed. The interlayer insulating layer 190may include at least one of, e.g., an oxide, a nitride, and anoxynitride, and may include a material having a low dielectric constant.

The first and second sacrificial layers 182 and 184 may be selectivelyremoved with respect to the active regions 105, the device isolationlayer 110, and the second gate separation layer 174, in the lowerportion, and a gate region GR exposing the active regions 105, thedevice isolation layer 110, and the second gate separation layer 174 maybe formed. The process of removing the first and second sacrificiallayers 182 and 184 may be performed using at least one of a dry etchingprocess and a wet etching process.

Referring to FIG. 10I, a gate dielectric layer 162 and a gate electrode165 may be formed in the gate region GR to finally form the gatestructure 160.

The gate dielectric layer 162 may be formed substantially conformallyalong the side wall and the lower surface of the gate region GR. Thegate dielectric layer 162 may include an oxide, a nitride, and a high-kmaterial. The gate electrode 165 may fill a space inside the gatedielectric layer 162. The gate electrode 165 may include a metal or asemiconductor material.

After the gate dielectric layer 162 and the gate electrode 165 areformed, a material remaining on the interlayer insulating layer 190 maybe removed using a planarization process such as a chemical mechanicalpolishing (CMP) process.

Referring to FIGS. 10J and 10K, a portion of the gate dielectric layer162 and the gate electrode 165 may be removed to form an opening OP.FIG. 10K illustrates a cross-section taken along cutting line V-V′ inFIG. 10J.

The opening OP may divide at least the gate electrode 165 of the gatestructure 160 in the Y direction into the first and second gateelectrodes 165A and 165B. The opening OP may be formed by not onlyremoving a portion of the gate electrode 165 but also removing a portionof the gate dielectric layer 162. In an implementation, the opening OPmay also be formed by removing the gate spacer layer 166 adjacentthereto in the Y direction.

Through the lower portion of the opening OP, the upper surface of thesecond gate separation layer 174 may be exposed, as shown in FIG. 10K.In the present step, the opening OP may not penetrate the entirethickness of the gate electrode 165, and may be formed by removing thegate electrode 165 only to the upper surface of the second gateseparation layer 174, and the process may be performed relativelyeasily. In addition, the lower portion of the gate electrode 165 may beisolated by the second gate separation layer 174, a size of the openingOP, e.g., a margin of a width in the Y direction may be alleviated, andthe process may be performed more easily.

Referring to FIG. 10L, the first gate separation layer 170 may be formedby filling an insulating material in the opening OP to form the firstgate separation layer 172, and contact plugs 195 may be formed. Thefirst gate separation layer 172 may be formed by filling the opening OPwith an insulating material, e.g., silicon nitride or the like.

Next, the interlayer insulating layer 190 may be patterned to formcontact holes, and a conductive material may be embedded in the contactholes to form contact plugs 195. The contact holes may be formed byremoving the interlayer insulating layer 190 on both sides of the gatestructure 160 by using a separate mask layer such as a photoresistpattern. Lower surfaces of the contact holes may have a curvature alongthe upper surfaces of the source/drain regions 150. When removing theinterlayer insulating layer 190, upper portions of the source/drainregions 150 may be partially recessed. The contact plugs 195 may beformed by depositing a conductive material in the contact holes toelectrically connect the source/drain regions 150. In an implementation,the shape and disposition of the contact plugs 195 may be variouslychanged.

FIGS. 11A to 11G illustrate views of stages in a manufacturing method ofa semiconductor device according to a process sequence according toexample embodiments. In FIGS. 11A to 11G, another example embodiment ofthe manufacturing method for manufacturing the semiconductor device ofFIGS. 1 to 3 will be described. Hereinafter, repeated descriptionsoverlapping with those described above with reference to FIGS. 10A to10L may be omitted.

Referring to FIG. 11A, the active regions 105 and the device isolationlayer 110 may be formed by patterning the substrate 101, and the activeregions 105 may protrude from the device isolation layer 110.

First, as described with reference to FIGS. 10A and 10B, the substrate101 may be patterned to form trench regions TI defining the activeregions 105, and the device isolation layer 110 embedding the trenchregions T1 may be formed.

Next, a process of protruding the active regions 105 from the deviceisolation layer 110 may be performed by partially removing the deviceisolation layer 110. However, unlike the example embodiment describedabove, with reference to FIGS. 10A to 10L, in the present step, thefirst gate separation layer 174 may not be formed.

Referring to FIG. 11B, the first and second sacrificial layers 182 and184 may be formed on the active regions 105 and the device isolationlayer 110.

As described above with reference to FIG. 10E, the first and secondsacrificial layers 182 and 184 may be patterned and formed so as to havea line shape extending in the Y direction intersecting the activeregions 105. The first and second sacrificial layers 182 and 184 may bepatterned using a third mask pattern layer 186.

Referring to FIG. 11C, a dummy active region 105D may be formed byremoving the exposed upper region of a portion of the active regions 105from both sides or outside of the first and second sacrificial layers182 and 184.

In order to form the dummy active region 105D, at least one upper regionof the exposed active regions 105 may be selectively removed withrespect to the device isolation layer 110. The depth of the activeregion 105 removed by the above process may be variously changed inexample embodiments. For example, the dummy active region 105D may havea lower height than the active regions 105 on both sides of the firstand second sacrificial layers 182 and 184. The dummy active region 105Dmay not be removed in the lower portions of, e.g., from under, the firstand second sacrificial layers 182 and 184, and the dummy active region105D may have substantially the same height as the active regions 105under the first and second sacrificial layers 182 and 184.

Referring to FIGS. 11D and 11E, a gate spacer layer 166, source/drainregions 150, an interlayer insulating layer 190, and a gate structure160 may be formed, and an opening OP′ may be formed. FIG. 11Eillustrates a cross-section along the cutting line VI-VI′ of FIG. 11D.

First, similar to those described above with reference to FIGS. 10G to10I, the gate spacer layer 166, the source/drain regions 150, and theinterlayer insulating layer 190 may be formed, and the first and secondsacrificial layers 182 and 184 may be removed and then to form the gatestructure 160.

Next, similar to those described above with reference to FIGS. 10J and10K, a portion of the gate dielectric layer 162, the gate electrode 165,and the dummy active region 105D may be removed to form an opening OP′.For example, in the present example embodiment, unlike in the exampleembodiment described above with reference to FIGS. 10J and 10K, theopening OP′ may be formed by removing not only a portion of the gateelectrode 165, but also of the dummy active region 105D, and it may beformed to have a shape having a step with a narrower step. The depth ofthe dummy active region 105D removed in the present step may be the sameas or different from the depth of the dummy active region 105 removed onboth sides of the first and second sacrificial layers 182 and 184 in theabove-described step with reference to FIG. 11C.

Referring to FIGS. 11F and 11G, the gate separation portion 170 may beformed by filling an insulating material in an opening OP′ to form thefirst and second gate separation layers 172 and 174 of the gateseparation portion 170. FIG. 11G illustrates a cross-section taken alongcross-sectional line VII-VII′ of FIG. 11F.

The first and second gate separation layers 172 and 174 may be formed byfiling the opening OP′ with an insulating material, e.g., siliconnitride or the like. In an implementation, the first and second gateseparation layers 172 and 174 may be formed through one deposition step,and may be formed of the same material, and may have a coupled,connected, or integral shape.

Thereafter, contact plugs 195 may be further formed, as described abovewith reference to FIG. 10L.

FIGS. 12A to 12C illustrate views of stages in a manufacturing method ofa semiconductor device according to example embodiments according to aprocess order. FIGS. 12A to 12C, an example embodiment of amanufacturing method of the semiconductor device of FIGS. 5A and 5B willbe described.

Referring to FIG. 12A, active regions 105, a device isolation layer 110,a dummy active region 105D, a second gate separation layer 174, firstand second sacrificial layers 182 and 184, a gate spacer layer 166,source/drain regions 150, and an interlayer insulating layer 190 may beformed, and then, a first gate separation layer 172 may be formed.

First, as described with reference to FIGS. 10A to 10G, the activeregions 105, the device isolation layer 110, the dummy active region105D, the second gate separation layer 174, the gate spacer layer 166,and the source/drain regions 150 may be formed.

Next, the interlayer insulating layer 190 may be formed on thesource/drain regions 150, a portion of the first and second sacrificiallayers 182 and 184 may be removed to form an opening, and the secondgate separation layer 174 may be formed by filling the opening to formthe gate separation portion 170. In the present embodiment, unlike theexample embodiment described above with reference to FIGS. 10A to 10L, aportion of the first and second sacrificial layers 182 and 184, ratherthan the gate dielectric layer 162 and the gate electrode 165, may beremoved to form the second gate separation layer 174.

Referring to FIG. 12B, the first and second sacrificial layers 182 and184, the sacrificial gate structure, may then be removed.

The first and second sacrificial layers 182 and 184 may be selectivelyremoved with respect to the active regions 105 in the lower portion, thedevice isolation layer 110, and the gate separation portion 170, a gateregion GR′ exposing the active regions 105, the device isolation layer110, and the gate separation portion 170 may be formed.

Referring to FIG. 12C, a gate dielectric layer 162 and a gate electrode165 may be formed in a gate region GR′ to finally form the gatestructure 160.

The gate dielectric layer 162 and the gate electrode 165 may be formedin a state in the gate separation portion 170 has already been formed,and the gate dielectric layer 162 may also be formed on the side surface(e.g., surface facing in the Y direction) of the first gate separationlayer 172.

Thereafter, contact plugs 195 may be further formed as described abovewith reference to FIG. 10L.

FIG. 13 illustrates a circuit diagram of an SRAM cell including asemiconductor device according to example embodiments.

Referring to FIG. 13, one cell in the SRAM device may include first andsecond driving transistors TN1 and TN2, first and second loadtransistors TP1 and TP2, and first and second access transistors TN3 andTN4. In this case, a source of the first and second driving transistorsTN1 and TN2 may be connected to a ground voltage line Vss, and a sourceof the first and second load transistors TP1 and TP2 may be connected toa power voltage line Vdd.

A first driving transistor TN1 formed of an NMOS transistor and a secondload transistor TP1 formed of a PMOS transistor may constitute a firstinverter, and a second driving transistor TN2 formed of an NMOStransistor and a second load transistor TP2 formed of a PMOS transistormay constitute a second inverter. At least portions of the first andsecond driving transistors TN1 and TN2, the first and second loadtransistors TP1 and TP2, and the first and second access transistors TN3and TN4 may include a semiconductor device according to various exampleembodiments as described above with reference to FIGS. 1 to 9B.

Output terminals of the first and second inverters may be connected tothe sources of the first access transistor TN3 and the second accesstransistor TN4. In addition, the first and second inverters may beconnected to each other such that an input terminal and an outputterminal intersect each other to configure one latch circuit. Drains ofthe first and second access transistors TN3 and TN4 may be connected tofirst and second bit lines BL and/BL, respectively.

FIG. 14 illustrates a diagram of an electronic apparatus including asemiconductor device according to example embodiments. Referring to FIG.14, an electronic apparatus 1000 according to an example embodiment mayinclude a communication unit 1010, an input unit 1020, an output unit1030, a memory 1040, and a processor 1050.

The communication unit 1010 may include a wired/wireless communicationmodule, e.g., a wireless internet module, a near field communicationsmodule, a global positioning system (GPS) module, a mobile communicationmodule, and the like. The wired/wireless communication module includedin the communication unit 1010 may transmit and receive data by beingconnected to external communication networks according to variouscommunication standards.

The input unit 1020 may be provided as a module provided for users tocontrol operations of the electronic apparatus 1000, and may include amechanical switch, a touchscreen, a voice recognition module, and thelike. In addition, the input unit 1020 may also include a finger mousedevice or a mouse operated using a trackball, a laser pointer, or thelike. The input unit 1020 may further include various sensor modules bywhich users may input data.

The output unit 1030 may output information processed in the electronicdevice 1000 in the form of audio or video, while the memory 1040 maystore a program, data, or the like, to process and control the processor1050. The processor 1050 may store as well as output data by sending acommand to the memory 1040 according to required operations.

The memory 1040 may communicate with the processor 1050 through aninterface embedded in the electronic apparatus 1000 or a separateinterface. In a case in which the memory 1040 communicates with theprocessor 1050 through a separate interface, the processor 1050 maystore data in or output data from the memory 1040 through variousinterface standards, such as SD, SDHC, SDXC, MICRO SD, USB, and thelike.

The processor 1050 may control operations of respective units includedin the electronic apparatus 1000. The processor 1050 may perform controland process operations relating to voice calls, video calls, datacommunications, and the like, or may perform control and processoperations to play and manage multimedia. In addition, the processor1050 may process inputs sent through the input unit 1020 by a user, andmay output the results through the output unit 1030. Furthermore, theprocessor 1050 may store data required to control operations of theelectronic device 1000 in the memory 1040 or output the data therefrom,as described above. At least one of the processor 1050 and the memory1040 may include semiconductor device according to various exampleembodiments, as described above.

FIG. 15 illustrates a schematic diagram of a system including asemiconductor device, according to example embodiments.

Referring to FIG. 15, a system 2000 may include a controller 2100, aninput/output device 2200, a memory 2300, and an interface 2400. Thesystem 2000 may be a system transmitting or receiving a mobile system orinformation. The mobile system may be a PDA, a portable computer, a webtablet, a wireless phone, a mobile phone, a digital music player, or amemory card.

The controller 2100 may execute a program and control the system 2000.The controller 2100 may be, e.g., a microprocessor, a digital signalprocessor, a microcontroller, or a similar device as described above.

The input/output device 2200 may be used to input or output data of thesystem 2000. The system 2000 may be connected to an external device,e.g., a personal computer or network, using the input/output device 2200to exchange data with the external device. The input/output device 2200may be, for example, a keypad, a keyboard, or a display.

The memory 2300 may store code and/or data for the operation of thecontroller 2100, and/or may store the processed data in the controller2100.

An interface 2400 may be a data transmission path between the system2000 and other external devices. The controller 2100, the input/outputdevice 2200, the memory 2300, and the interface 2400 may communicatewith each other via a bus 2500.

At least one of the controller 2100 or the memory 2300 may include asemiconductor device according to various example embodiments asdescribed above with reference to FIGS. 1 to 5 and FIGS. 12 to 15B.

By way of summation and review, to help overcome limitations of elementcharacteristics of a planar MOSFET, efforts have been made to develop asemiconductor device including a FinFET having a channel having athree-dimensional structure.

One or more embodiments may provide a semiconductor device havingimproved reliability.

As set forth above, by forming a gate separation layer for separating agate electrode into a plurality of layers being stacked vertically, asemiconductor device with improved reliability may be provided.

Example embodiments have been disclosed herein, and although specificterms are employed, they are used and are to be interpreted in a genericand descriptive sense only and not for purpose of limitation. In someinstances, as would be apparent to one of ordinary skill in the art asof the filing of the present application, features, characteristics,and/or elements described in connection with a particular embodiment maybe used singly or in combination with features, characteristics, and/orelements described in connection with other embodiments unless otherwisespecifically indicated. Accordingly, it will be understood by those ofskill in the art that various changes in form and details may be madewithout departing from the spirit and scope of the present invention asset forth in the following claims.

What is claimed is:
 1. A semiconductor device, comprising: a pluralityof active regions extending in a first direction on a substrate; adevice isolation layer between the plurality of active regions such thatupper portions of the plurality of active regions protrude from thedevice isolation layer; a first gate electrode and a second gateelectrode extending in a second direction crossing the first directionand intersecting the plurality of active regions, respectively, on thesubstrate, the first gate electrode being spaced apart from the secondgate electrode in the second direction; a first gate separation layerbetween the first gate electrode and the second gate electrode; a secondgate separation layer under the first gate separation layer and betweenthe first gate electrode and the second gate electrode, the second gateseparation layer extending into the device isolation layer in a thirddirection crossing the first direction and the second direction; and adummy active region extending in the first direction and under thesecond gate separation layer, wherein: the second gate separation layeris between the first gate separation layer and the dummy active regionin the third direction, and a bending portion according to a widthdifference is between the first gate separation layer and the secondgate separation layer.
 2. The semiconductor device as claimed in claim1, wherein an upper surface of the second gate separation layer is at aheight relative to the substrate in the third direction that is higherthan a height level relative to the substrate in the third direction ofan upper surface of the device isolation layer.
 3. The semiconductordevice as claimed in claim 1, wherein an upper surface of the secondgate separation layer is at a substantially same height relative to thesubstrate in the third direction as a height relative to the substratein the third direction of upper surfaces of the plurality of activeregions under the first gate electrode and the second gate electrode. 4.The semiconductor device as claimed in claim 1, wherein a width of thesecond gate separation layer in the second direction is narrower than awidth of the first gate separation layer in the second direction.
 5. Thesemiconductor device as claimed in claim 1, wherein the dummy activeregion has a height relative to the substrate in the third directionthat is lower than a height relative to the substrate in the thirddirection of the plurality of active regions.
 6. The semiconductordevice as claimed in claim 1, wherein a lower surface of the second gateseparation layer is in contact with the device isolation layer.
 7. Thesemiconductor device as claimed in claim 1, wherein the first gateseparation layer and the second gate separation layer each independentlyinclude an insulating material.
 8. The semiconductor device as claimedin claim 1, further comprising gate dielectric layers between theplurality of active regions and the first and second gate electrodes. 9.The semiconductor device as claimed in claim 8, wherein the gatedielectric layers cover: lower surfaces of the first gate electrode andthe second gate electrode, and a side surface of a portion of the secondgate separation layer outside of the device isolation layer.
 10. Thesemiconductor device as claimed in claim 9, wherein the gate dielectriclayer extends from the side surface of the second gate separation layerto also cover a side surface of the first gate separation layer.
 11. Thesemiconductor device as claimed in claim 1, wherein a portion of thesecond gate separation layer between the first gate electrode and thesecond gate electrode has a first height relative to the substrate inthe third direction, and a portion of the second gate separation layerat both sides of the first and second gate electrodes in the firstdirection has a second height relative to the substrate in the thirddirection, the second height being lower than the first height.
 12. Thesemiconductor device as claimed in claim 1, wherein the second gateseparation layer is between the first gate electrode and the second gateelectrode, without extending at both sides of the first gate electrodeand the second gate electrode in the first direction.
 13. Thesemiconductor device as claimed in claim 1, wherein a width of the firstgate separation layer in the second direction is greater than a width ofan active region of the plurality of active regions in the seconddirection and a width of the dummy active region in the seconddirection.
 14. The semiconductor device as claimed in claim 1, whereinthe second gate separation layer, together with the dummy active region,has a substantially same shape as an active region of the plurality ofactive regions.
 15. A semiconductor device, comprising: a plurality ofactive regions extending in a first direction on a substrate; a firstgate electrode and a second gate electrode extending in a seconddirection crossing the first direction and intersecting the plurality ofactive regions on the substrate, the first gate electrode being spacedapart from the second gate electrode in the second direction; a gateseparation portion between the first gate electrode and the second gateelectrode; and a dummy active region under the gate separation portion,wherein: the gate separation portion includes at least two layersstacked in a third direction, perpendicular to the first direction andthe second direction, and having different widths, and the gateseparation portion includes: a first gate separation layer at an upperportion thereof, and a second gate separation layer on a sidewall of thedummy active region and a lower portion of the first gate separationlayer.
 16. The semiconductor device as claimed in claim 15, wherein thegate separation portion extends in the first direction between the firstgate electrode and the second gate electrode.
 17. The semiconductordevice as claimed in claim 15, further comprising a device isolationlayer between the plurality of active regions such that upper portionsof the plurality of active regions protrude in the third direction fromthe device isolation layer, wherein a lower surface of the gateseparation portion is at a height relative to the substrate in the thirddirection that is lower than a height relative to the substrate in thethird direction of an upper surface of the device isolation layer.
 18. Asemiconductor device, comprising: a plurality of active regionsextending in one direction; a dummy active region in parallel with theplurality of active regions; a first gate electrode and a second gateelectrode intersecting the plurality of active regions and the dummyactive region, the first gate electrode being spaced apart from thesecond gate electrode on a straight line; a first gate separation layerextending downwardly from upper surfaces of the first gate electrode andthe second gate electrode, the first gate separation layer being betweenthe first gate electrode and the second gate electrode; and a secondgate separation layer under the first gate separation layer, the secondgate separation layer being in contact with the first gate separationlayer and the dummy active region, wherein: the second gate separationlayer is on the dummy active region, and the second gate separationlayer, together with the dummy active region, has a substantially sameshape as an active region of the plurality of active regions.
 19. Thesemiconductor device as claimed in claim 18, wherein an upper surface ofthe first gate separation layer is substantially coplanar with the uppersurfaces of the first gate electrode and the second gate electrode.